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Femtosecond pulsed laser direct write production of nano- and microfluidic channels
McDonald, JP; Mistry, VR; Ray, KE; Yalisove, SM
Nano- and microfluidic channels were produced by selectively delaminating 1200 nm thermally grown oxide films (SiO2) films from Si(100) substrates using a femtosecond pulsed laser. Single pass channels exhibiting bell-like cross sections with widths of 24 mu m and heights of 355 nm were directly written at a speed of 1 cm/s while larger channels (320 mu m in width and similar to 15 mu m in height) were produced by laterally overlapping single pass channels. The results of an investigation of the interior surfaces of the channels via atomic force microscopy and scanning electron microscopy are presented.
Applied Physics Letters
2006
88
18
http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000088000018183113000001&idtype=cvips