Focused Ion Beams for Nanomanufacturing: Anisotropic Collodoidal Nanofludic Manufacturing |
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Collaborators: Michael J. Solomon, Sharon Glotzer, Mark Burns; University of Michigan- Ann Arbor
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Materials:
Semiconductors
Nanomaterials
Application: Electronic Energy Technique: Processing Characterization Synthesis |
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Highly lauded for its potential in biomedical applications - which usually involve particles of tens of microns or larger - microfludic device is marching towards a new scale level. Nanoparticles, unlike microparticles, are Brownian. Their packing and interaction may result in interesting hierarchical particle assmblies, which could unveil great scientific mysteries at fundamental level and impact tremendously in semiconductor and biomedical researches. Focused Ion Beam (FIB) is considered a good complement to existing semiconductor fabrication techniques for micro- and nanofludic device manufacturing, for its short lead time and great micro-maneuverability. By integrating with semiconductor fabrication techniques, we have shown the potential of making innovative device at sub-micron level, which we will eventually try to get down to nano level. This project also includes, but is not limited to, charactization of nano-particle, fabrication process devleopment and device design. |
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Materials Science and Engineering, University of Michigan
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- Focused Ion Beams for Nanomanufacturing: Anisotropic Collodoidal Nanofludic Manufacturing
| P.I.: | Joanna Mirecki-Millunchick |
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| Sponsor: | National Science Foundation |