Document Actions
Denton Sputter System
This 2500 Watt, direct current, planar magnetron sputter system is manufactured by Denton Vacuum, Inc. It is used by the Center for deposition of nanometer to micron scale coatings on a variety of substrates. The unit has dual 4 inch cathodes which allow for deposition in two different sputtering geometries, or for deposition of multilayer coatings.
The instrument is also coupled with the 18 kW Rigaku rotating anode x-ray generator. The system can be reconfigured and aligned to direct the x-ray radiation into the chamber for in-situ examination of structure and texture during growth.
Recent additions to the system include a hotstage capable of reaching up to 900°C for deposition onto heated substrates.
1174 G. G. Brown
True
True
False
False
