Vacuum Thermal Evaporator (Angstrom Engineering Inc)
Base pressure: 5 x 10^-8 Torr
Typical deposition pressure: 10^-7 Torr
Compatible Materials: Small molecule organics (e.g. Alq3, CuPc, C60) and non-refractory metals (e.g. Al, Au, Ag, Mg)
Substrate size: 4 inches diameter
2001 Dow
True
True
False
False
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