Gary Was


1921 Cooley

T: (734) 763-4675






Michigan Ion Beam Laboratory

Location: Naval Architecture and Marine Engineering Building
The 1.7 MV Tandetron accelerator facility in the Michigan Ion Beam Laboratory (MIBL) has been developed specifically for proton irradiation and surface analysis experiments.  For proton-irradiations, the accelerator operates with a state-of-the art TORVIS ion source from National Electrostatics Corporation (NEC).  Up to 100 microA of proton current can be transmitted to the target end through the 15° beamline.  This is well beyond the value needed to conduct high dose rate and high dose irradiations.  The facility also provides a special sample stage for irradiation under carefully controlled conditions. Irradiations parameters such as dose, dost-rate, and temperature are computer-monitored.  The entire irradiated sample area is monitored continuously with a 50 um resolution using a high precision thermal imager (the Stinger by IRCON), providing unprecedented capability to verify irradiation temperature everywhere on the samples throughout the irradiation.  The 30° beamline is used for ion beam analysis and contains an aperture system for ion channeling. The analysis chamber is turbopumped and equipped for rapid sample turnaround. It contains a two-axis goniometer and detectors for backscattering and glancing angle measurements. Rutherford backscattering spectrometry (RBS), nuclear reaction analysis (NRA) elastic recoil detection (ERD) and ion channeling are conducted in this chamber.
The laboratory is also equipped with an Ion Beam Assisted Deposition System (IBAD).  IBAD is a combined process in which a film formed on a substrate is bombarded simultaneously with a directed beam of energetic ions. Ion energy, angle and ion-to-atom arrival rate ratio can be precisely controlled. Energetic ions can be used to modify film density, stress, texture, grain size, structure of the interface and other related properties.  The chamber is crypumped with two CTI 8 cryopumps that could provide vacuum in the 10-9 torr and even 10-10 torr range.
Other pieces of equipment in the lab that assist researchers in their work, are: a hardness indenter that is computer controlled with the capability of automatic measurements, a vacuum furnace that provides heat treating and annealing capability and a Profilometer for thin films measurements.
MIBL is in the process to be equipped with a new state-of-the-art 400 KV implanter.  This is a hybrid system built by NEC with a source provided by Danfysik.  It has the capability to produce a beam with any element in the periodic table of elements and with energies between 20 – 400 KV.